Spectroscopic ellipsometry studies of nanocrystalline carbon thin films deposited by HFCVD

Diamond and Related Materials

Volumn 10, Issue 11, 2001, Pages 1968-1972

  Gupta, S ^a   Weiner, B R ^a   Morell, G ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Chemical vapor deposition (CVD); Electron or ion assisted deposition; Ellipsometry; Modelling; Nanocrystalline carbon

Indexed keywords

NANOCRYSTALLINE CARBON THIN FILMS;

COMPUTER SIMULATION; HYDROGEN; METHANE; MOLYBDENUM; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; REGRESSION ANALYSIS; SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON; INORGANIC COATING; NANOCRYSTAL; SPECTROSCOPY; VAPOR DEPOSITION;

EID: 0035500080     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00387-9     Document Type: Article

References (19)