Ellipsometric analysis of polysilicon layers

Thin Solid Films

Volumn 364, Issue 1, 2000, Pages 138-143

  Gruska, B ^a  

^a SENTECH INSTRUMENTS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; DEPOSITION; DIELECTRIC PROPERTIES; ELLIPSOMETRY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

DIELECTRIC FUNCTIONS; EFFECTIVE MEDIUM APPROXIMATION (EMA); POLYSILICON SILICON FILMS;

SEMICONDUCTING FILMS;

EID: 0033899069     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00941-4     Document Type: Article

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