Process modeling of projection micro stereo lithography for three-dimensional MEMS

American Society of Mechanical Engineers, Micro-Electromechanical Systems Division Publication (MEMS)

Volumn 3, Issue , 2001, Pages 813-818

  Sun, Cheng ^a   Fang, Nicholas ^a   Zhang, Xiang ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DOPING (ADDITIVES); LIGHT MODULATION; LITHOGRAPHY; MICROMACHINING; MICROSTRUCTURE; OPTIMIZATION; PHOTOPOLYMERIZATION; SENSORS; SILICON;

SPATIAL RESOLUTION; STEREO LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 1542747759     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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