Freeform fabrication of functional microsolenoids, electromagnets and helical springs using high-pressure laser chemical vapor deposition

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 232-237

  Williams, K ^a   Maxwell, J ^a   Larsson, K ^a   Boman, M ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; ELECTROMAGNETS; LASER APPLICATIONS; MAGNETIC CORES; MOLECULAR WEIGHT; NATURAL CONVECTION; POLYCRYSTALLINE MATERIALS; SINGLE CRYSTALS; SOLENOIDS; TUNGSTEN CARBIDE;

HIGH-PRESSURE LASER CHEMICAL VAPOR DEPOSITION;

MICROELECTRONIC PROCESSING;

EID: 0032635177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746821     Document Type: Conference Paper

References (12)