Microfabrication by use of a spatial light modulator in the ultraviolet: Experimental results

Optics Letters

Volumn 24, Issue 8, 1999, Pages 549-550

  Farsari, Maria ^a   Huang, Shiping ^a   Birch, Phil ^a   Claret Tournier, Frédéric ^a   Young, Rupert ^a   Budgett, David ^a   Bradfield, Chris ^a   Chatwin, Chris ^a  

^a UNIVERSITY OF SUSSEX   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LASER APPLICATIONS; LIGHT MODULATION; MASKS; ULTRAVIOLET RADIATION;

MICROSTEREOPHOTOLITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 0032614871     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.24.000549     Document Type: Article

References (5)

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3. S. Huang, M. I. Heywood, R. C. D. Young, M. Farsari, and C. R. Chatwin, Microprocessors Microsystems 22, 67 (1998).
4. C. Chatwin, M. Farsari, S. Huang, M. Heywood, P. Birch, R. Young, and J. Richardson, Appl. Opt. 37, 7514 (1998).
5. M. Farsari, S. Huang, R. C. D. Young, M. I. Heywood, P. J. B. Morrell, and C. R. Chatwin, Opt. Eng. 37, 2754 (1998).