Design of compliant force and displacement amplification micro-mechanisms

Proceedings of the ASME Design Engineering Technical Conference

Volumn 2, Issue , 2001, Pages 741-748

  Parkinson, Matthew B ^a   Jensen, Brian D ^b   Kurabayashl, Katsuo ^b  

^a UNIVERSITY OF MICHIGAN MEDICAL SCHOOL   (United States)

^b University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; GEOMETRY; MACHINE DESIGN; MATHEMATICAL MODELS; OPTIMIZATION; PARETO PRINCIPLE; PROBLEM SOLVING; SET THEORY; TOPOLOGY; TRANSDUCERS; COMPUTER AIDED DESIGN; ECONOMIC AND SOCIAL EFFECTS; MULTIOBJECTIVE OPTIMIZATION;

COMPLIANT FORCES; OPTIMAL DESIGNS; PARETO SETS; FORCE AND DISPLACEMENTS; FORCE INPUT; LINK MECHANISMS; LOADING CONDITION; MECHANICAL ADVANTAGE; MEMS APPLICATIONS; MICRO MECHANISMS; MULTICRITERIA OPTIMIZATION;

MICROELECTROMECHANICAL DEVICES; GEOMETRY;

EID: 1542540356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

1. Roessig, T.A., Howe, R.T., Pisano, A.P., and Smith, J.H., 1997, "Surface-micromachined resonant accelerometer," Intern. Conf. on Solid-State Sensors and Actuators, 97TH8267, pp. 859-862.
2. Sato, K., Shikida, M., Yamasaki, M., and Yoshioka, T., 1996, "Micro tensile-test system fabricated on a single crystal silicon chip," Proc. IEEE Micro Electro Mechanical Systems (MEMS) 1996, 96CH35856, pp. 360-364.
3. Comtios, J.H., and Bright, V.M., 1997, "Applications for surface-micromachined polysilicon thermal actuators and arrays," Sensors and Actuators, A: Physical, vol. 58, no. 1, Jan. 1997, pp. 19-25.
4. Cragun, R., and Howell, L.L., 1999, "Linear Thermomechanical Microactuators," Micro-electro-mechanical Systems (MEMS), 1999 ASME International Mechanical Engineering Congress and Exposition, pp. 181-188.
5. Cragun, R., and Howell, L.L., 1998, "Constrained thermal expansion micro-actuator," Micro-electro-meehanical Systems (MEMS), 1998 ASME International Mechanical Engineering Congress and Exposition, DSV vol. 66, pp. 365-371.
6. Que, L., Park, J.-S., and Gianchandani, Y.B., 1999, "Bent-beam electro-thermal actuators for high force applications," Proc. IEEE Micro Electro Mechanical Systems (MEMS) 1999, 99CH36291, pp. 31-36.
7. Chen, H. and Sun, P., 1996, "Design of two-layer flexible hinge milli-gripper," Proc. Intern. Symp. Micro Machine and Human Science, 96TH8213, pp. 99-104.
8. Goldfarb, M. and Lipsey, J.H., 1997, "Design of a minimum surface-effect tendon-based microactuator for micromanipulation," Proc. IEEE Intern. Conf. on Robotics and Automation, 97CH35992, pp. 1460-1465.
9. King, T., Pozzi, M., and Manara, Angelo, 2000, "Piezoactuators for real-world applications: Can they deliver sufficient displacement?," Power Engineering Journal, vol. 14, no. 3, pp. 105-110.
10. Capelleri, D.J., Frecker, ML, and Simpson, T.W., 2000, "Optimal design of a PZT bimorph actuator for minimally invasive surgery," Proc. SPIE - Smart Structures and Materials 2000 - Mathematics and Control in Smart Structures, vol. 3984, pp. 321-335.
11. Huang, X.T., Saif, M.T., and MacDonald, N.C., 1996, "Micromotion amplifier," Proc. IEEE Micro Electro Mechanical Systems (MEMS), 96CH35856, pp. 424-428.
12. Kota, S., Hetrick, J., Li, Z., Rodgers, S., and Krygowski, T., 2000, "Sythesizing high-performance compliant stroke amplification systems for MEMS," Proc. IEEE Micro Electro Mechanical Systems (MEMS) 2000, OOCB36308, pp. 164-169.
13. Ananthasuresh, G.K. and Kota, S., 1996, "The Role of Compliance in the Design of MEMS," Proceedings of the 1996 ASME Design Engineering Technical Conferences, 96-DETC/MECH-1309.
14. Kota, S., Hetrick, J., Li, Z., and Saggere, L., 1999, "Tailoring unconventional actuators using compliant transmissions: design methods and applications," IEEE/ASME Transactions on Mechatronics, vol. 4 no. 4, pp. 396-408.
15. Canfield, S. and Frecker, M., 2000, "Topology optimization of compliant mechanical amplifiers for piezoelectric actuators," Structural and Multidisciplinary Optimization, vol. 20, no. 4, pp. 269-279.
16. Howell, L.L. and Midha, A., 1994, "A Method for the Design of Compliant Mechanisms with Small-Length Flexural Pivots," ASME Journal of Mechanical Design, Vol. 116, No. 1, pp. 280-290.
17. Sharpe, W.N. Jr., Brown, S., Johnson, G.C., and Knauss, W., 1998, "Round-robin tests of modulus and strength of polysilicon," Microelectromechanical Structures for Material Research, MRS vol. 518, pp. 57-65.
18. Kirkpatrick, S., Gelatt, C.D., and Vecchi, M.P., 1983, "Optimization by Simulated Annealing," Science, vol. 22, no. 459, p. 671.
19. Parkinson, A.R., and Wilson, M., 1988, "Development of Hybrid GRG-SQP Algorithm for Constrained Nonlinear Programming," J of Mech. Trans. and Automation in Design, Trans. ASME, vol. 110, p. 308.