The role of compliance in the design of MEMS

Proceedings of the ASME Design Engineering Technical Conference

Volumn 1, Issue , 1996, Pages

  Ananthasuresh, G K ^a   Kota, Sridhar ^b  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS;

DEVICES AND SYSTEMS; MECHANICAL DESIGN; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMACHINING TECHNIQUES;

MACHINE DESIGN;

EID: 84863603418     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/96-DETC/DFM-1309     Document Type: Conference Paper

References (18)

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