Micro tensile-test system fabricated on a single crystal silicon chip

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 360-364

  Sato, Kazuo ^a   Shikida, Mitsuhiro ^a   Yamasaki, Masanori ^a   Yoshioka, Tetsuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ELASTIC MODULI; ETCHING; FABRICATION; HARDNESS TESTING; SEMICONDUCTING SILICON; SILICON WAFERS; SINGLE CRYSTALS; TENSILE TESTING; THIN FILMS;

CHEMICAL ANISOTROPIC ETCHING; SINGLE CRYSTAL SILICON CHIP;

MICROELECTROMECHANICAL DEVICES;

EID: 0029732309     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)