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British Ceramic Transactions

Volumn 103, Issue 1, 2004, Pages 15-18

Room temperature preparation of c axis oriented ZnO films on Si(100), SiO2, and ZnO substrates by rf magnetron sputtering

(2) Kim, N H a Kim, H W a

a Inha University (South Korea)

Author keywords

Amorphous ZnO; Magnetron sputtering; Thin films; Zinc oxide ceramic

Indexed keywords

GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT; ZINC OXIDE;

AMORPHOUS ZNO; ZINC OXIDE CERAMICS;

THIN FILMS;

EID: 1542346791 PISSN: 09679782 EISSN: None Source Type: Journal
DOI: 10.1179/096797804225012657 Document Type: Article

Times cited : (2)

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