Structural characterization of ZnO films grown on SiO2 by the RF magnetron sputtering

Physica B: Condensed Matter

Volumn 334, Issue 3-4, 2003, Pages 343-346

  Kim, Kwang Sik ^a   Kim, Hyoun Woo ^a   Kim, Nam Ho ^a  

^a Inha University   (South Korea)

Author keywords

Annealing; RF magnetron sputtering; Scanning electron microscopy; Thin films; X ray diffraction; ZnO

Indexed keywords

ANNEALING; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SILICA; X RAY DIFFRACTION; ZINC OXIDE;

STRUCTURAL CHARACTERISTICS;

THIN FILMS;

EID: 0037566295     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(03)00096-6     Document Type: Article

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