Novel sensor fabrication using direct-write thermal spray and precision laser micromachining

Journal of Manufacturing Science and Engineering

Volumn 126, Issue 4, 2004, Pages 830-836

  Chen, Q ^a   Tong, T ^a   Longtin, J P ^a   Tankiewicz, S ^a   Sampath, S ^a   Gambino, R J ^a  

^a Stony Brook University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; LASER APPLICATIONS; MICROMACHINING; RAPID PROTOTYPING; RESISTORS; STRAIN GAGES; THIN FILMS;

DIRECT-WRITE TECHNIQUE; PULSE DURATION; SENSOR PROPERTIES; SPATIAL RESOLUTION;

SENSORS;

EID: 14744297767     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1813481     Document Type: Article

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