High temperature strain gages based on reactively sputtered AlNx thin films

Surface and Coatings Technology

Volumn 88, Issue 1-3, 1997, Pages 79-89

  Gregory, Otto J ^a   Bruins Slot, Arnout ^a   Amons, Paul S ^a   Crisman, Everett E ^b  

^a UNIVERSITY OF RHODE ISLAND   (United States)

^b BROWN UNIVERSITY   (United States)

Author keywords

Aluminum nitride; High temperature; Piezoresistors; Sputtered AlN; Strain sensors

Indexed keywords

ALUMINUM COMPOUNDS; HIGH TEMPERATURE OPERATIONS; NITRIDES; PLASMA SPRAYING; SPUTTERING; STRAIN GAGES;

ALUMINUM NITRIDE; REACTIVE SPUTTERING; STRAIN SENSORS;

THIN FILMS;

EID: 0030825527     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02889-7     Document Type: Article

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