Micromachined silicon thermopile and thermal radiators using porous silicon technology

IEE Proceedings: Optoelectronics

Volumn 145, Issue 5, 1998, Pages 307-311

  Dobrzariski, L ^a,b  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^b VIGO SYSTEM S A   (Poland)

Author keywords

Micromachincd thermopiles; Porous silicon technology; Thermal microcmittcrs

Indexed keywords

DOPING (ADDITIVES); METALLIZING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS SILICON; SPUTTER DEPOSITION; THERMOPILES;

HOT JUNCTIONS; THERMAL RADIATORS;

OPTOELECTRONIC DEVICES;

EID: 0032179909     PISSN: 13502433     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-opt:19982301     Document Type: Article

References (16)

1. KRUSE, P.W., MCGLAUCHLIN, L.D., and MCQUISTAN, R.B.: 'Elements of Infrared Technoloey' (John Wiley, New York, 1962)
2. HOUGHTON, J., and SMITH, S.D.: 'Physics of Infrared' (Clarendon Press, Oxford, 1966)
3. HUDSON, R.D.: 'Infrared System Engineering' (Wiley Interscience, New York, 1969)
4. HUDSON, R., and HUDSON, J.: 'Infrared Detectors' (Hutchinson and Ross, Wiley, (1975)
5. STEVENS, N.B.: 'Radiation thermopiles', Semiconductors and seiiiiinelals, 1970, 5, pp. 287
6. SCHILDKRAUT, E.: 'IR image generation by thermoelectric elements', Proc. SPIE, I987, 765, pp. 102-108
7. WOOD, R.A., HAN, C.J., and KRUSE, P.W.: 'Integrated uncooled infrared detector imaeing arrays'. Proc. IEEE, Solid State Sensor and Actuator Workshop, Island, SC, 1992, pp. 132135
8. WOOD, R.A.: 'Uncooled thermal imaeing with monolithic silicon focal planes', Proc SPIE. 1993, 2020, pp. 322-329
9. WOOD, R.A., and FOSS, N.A.: 'Micromachined bolometer arrays achieve low-cost imaging', Laser Focus World, June 1993, pp. 322
10. UNEWISSE, M.H., PASSMORE, S.J., LIDDIARD, K.C., and WATSON, R.J.: 'Performance of uncooled semiconductor film bolometer infrared detectors', SPIE, Infrared Technology XX, 1994, 2569, pp. 43
11. RASMUSSEN, W.: Thermal sensors' in RISTIC, L. (Ed.): 'Sensor Technology and Devices (Artcch House, Boston, 1994)
12. KANNO, T., SAGA, M., MATSUMOTO, S., UCHIDA, M., TSUKAMOTO, N., TANAKA, A., ITOH, S., NAKAZATO, A., ENDOH, T., TOHYAMA, S., YAMAMOTO, Y., MURASHIMA, S., FUJIMOTO, N., and TERANISHI, N.: 'Uncooled infrared focal plane having 128 x 128 thermopile detector elements', Proc. SPIE, Infrared Technology XX, 1994, 2269, pp. 450
13. LANG, W., STEINER, P., SCHABER, U., and RICHTER, A.: 'A thin film bolometer using porous silicon technology', Sens. Actuators, 1994, A43, pp. 185-187
14. KRUSE, P.W.: 'Uncooled IR focal plane arrays', SPIE, Infrared Technology XXI, 1995, 2524,
15. UNEWISSE, M.H., CRAIG, B.I., WATSON, R.J., REINHOLD, O., and LIDDIARD, K.C.: 'The growth and properties of semiconductor bolometers for infrared detection', Proc. SPIE, 1995, 2554, pp. 43-54
16. PIOTROWSKI, J.: 'Breakthrough in infrared technology- the micromachined detector arrays', Opt. Electron. Re\:, 1995, 3, pp. 3-8