A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

Czechoslovak Journal of Physics

Volumn 49, Issue 4, 1999, Pages 483-498

  Behnke, J F ^a   Passoth, E ^a   Csambal, C ^a   Tichy M ^b   Kudrna, P ^b   Trunec, D ^c   Brablec, A ^c  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b CHARLES UNIVERSITY   (Czech Republic)

^c MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033421005     PISSN: 00114626     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1022816925175     Document Type: Article

References (32)

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