A new laser heterodyne confocal probe for ultraprecision measurement of discontinuous contours

Measurement Science and Technology

Volumn 16, Issue 2, 2005, Pages 497-504

  Zhao, Weiqian ^a   Tan, Jiubin ^a   Qiu, Lirong ^a   Zou, Limin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Confocal microscope; Discontinuous surface; Heterodyne confocal probe; Laser probe; Surface contours

Indexed keywords

ERROR ANALYSIS; HETERODYNING; LASER APPLICATIONS; MICROSCOPES; NONLINEAR SYSTEMS;

ELECTRIC DRIFT; LASER HETERODYNE CONFOCAL PROBE (LHCP); LIGHT PATH; REFLECTION CONFOCAL MICROSCOPES (RCM);

PROBES;

LASER MEASUREMENT;

EID: 13944280622     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/16/2/023     Document Type: Article

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