Surface profilometry with a fibre optical confocal scanning microscope

Measurement Science and Technology

Volumn 11, Issue 12, 2000, Pages 1786-1791

  Yang, Lisong ^a,b   Wang, Guiying ^a   Wang, Jiangang ^a   Xu, Zhizhan ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b NONE   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DISKS; LIGHT REFLECTION; MEASUREMENT ERRORS; OPTICAL FIBERS; SCANNING;

DIFFERENTIAL CONFOCAL MICROSCOPY (DCM); FIBER OPTICAL CONFOCAL SCANNING MICROSCOPES (FOCSM); SURFACE PROFILOMETRY;

OPTICAL MICROSCOPY;

EID: 0343290253     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/12/319     Document Type: Article

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