Micro-Raman scattering from undoped and phosphorous-doped (111) homoepitaxial diamond films: Stress imaging of cracks

Journal of Applied Physics

Volumn 97, Issue 4, 2005, Pages

  Mermoux, M ^a   Marcus, B ^a   Crisci, A ^a   Tajani, A ^b   Gheeraert, E ^b   Bustarret, E ^b  

^a LEPMI   (France)

^b UNIV GRENOBLE ALPES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CONFOCAL OPTICS; MICRO-RAMAN SCATTERING; SIX FOLD SYMMETRY; STRESS IMAGING;

CRACKS; DOPING (ADDITIVES); HALL EFFECT; IMAGING TECHNIQUES; PHOSPHORUS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ANALYSIS; SUBSTRATES; TENSILE STRESS;

DIAMOND FILMS;

EID: 13744252951     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1849828     Document Type: Article

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