Characterization of <111> diamond thin films by micro-Raman spectroscopy

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 886-890

  Mermoux, M ^a   Tajani, A ^a   Marcus, B ^a   Bustarret, E ^a   Gheeraert, E ^a   Nesladek, M ^b   Koizumi, S ^c  

^a CNRS   (France)

^b HASSELT UNIVERSITY   (Belgium)

^c NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Homoepitaxy of diamond films; Raman spectroscopy; Strain; Vibrational properties characterization

Indexed keywords

COMPACTION; DOPING (ADDITIVES); EPITAXIAL GROWTH; PHOSPHORUS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SUBSTRATES; TENSILE STRENGTH;

DIAMOND THIN FILMS; HOMOEPITAXIAL GROWTH; TENSILE STRAIN;

DIAMOND FILMS;

DIAMOND;

EID: 2442600238     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.12.002     Document Type: Article

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