Suppression of oxygen diffusion by thin Al 2O 3 films grown on SrTiO 3 studied using a monoenergetic positron beam

Journal of Applied Physics

Volumn 97, Issue 3, 2005, Pages

  Uedono, A ^a,b   Kiyohara, M ^a,c   Yasui, N ^a   Yamabe, K ^a,b  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c SII NANOTECHNOLOGY INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DOPPLER BROADENING SPECTRA; MONOENERGETIC POSITRON BEAMS; OXYGEN DIFFUSION; SUPPRESSION;

ALUMINA; ANNEALING; CRYSTAL STRUCTURE; DOPPLER EFFECT; EPITAXIAL GROWTH; MOLECULAR BEAM EPITAXY; MOS DEVICES; MOSFET DEVICES; POSITRONS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; STRONTIUM COMPOUNDS; THERMODYNAMIC STABILITY; THIN FILMS;

DIFFUSION IN GASES;

EID: 13644274223     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1836010     Document Type: Article

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