Investigation of a-C:F films as hydrogenated diamond-like carbon and low-k materials

Thin Solid Films

Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 109-112

  Oh, Teresa ^a   Choi, Chi Kyu ^a   Lee, Kwang Man ^a  

^a Jeju National University   (South Korea)

Author keywords

a C:F films; Diamond like carbon; Diels Alder reaction; Inductive effect; Low k materials; Resonance effect

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; METHANE; PERMITTIVITY; RAMAN SCATTERING; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

A-C:F FILMS; DIAMOND-LIKE CARBON; DIELS-ALDER REACTION; INDUCTIVE EFFECT; LOW-K MATERIALS; RESONANCE EFFECT;

DIAMOND LIKE CARBON FILMS;

EID: 13444302503     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.07.022     Document Type: Conference Paper

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