Energy and angular distributions of ions and neutrals extracted from a slot in contact with a high-density plasma

IEEE Transactions on Plasma Science

Volumn 30, Issue 1 I, 2002, Pages 126-127

  Kim, Doosik ^a   Economou, Demetre J ^a  

^a University of Houston   (United States)

Author keywords

Fluid Monte Carlo simulation; Plasma molding; Sheath simulation

Indexed keywords

ARGON; COMPUTER SIMULATION; IONS; MOLDING; MONTE CARLO METHODS; PLASMA SHEATHS;

PLASMA MOLDING;

PLASMAS;

EID: 0036478214     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.1003956     Document Type: Article

References (3)

1. Kinetic theory of the plasma-sheath transition in a weakly ionized plasma