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ChemPhysChem

Volumn 6, Issue 1, 2005, Pages 70-74

Directed organic grafting on locally doped silicon substrates

(4) Charlier, Julienne a Baraton, Laurent a Bureau, Christophe b Palacin, Serge a

a CEA SACLAY (France)

b Alchimer SA (France)

Author keywords

Grafting; Microelectronics; Nanotechnology; Organic coating; Silicon

Indexed keywords

GRAFTING (CHEMICAL); LITHOGRAPHY; MICROELECTRONICS; NANOTECHNOLOGY; ORGANIC COATINGS; SILICON;

DOPED SILICON; ELECTROGRAFTING; METHACRYLONITRILE;

SUBSTRATES;

METHACRYLONITRILE; SILICON;

ARTICLE; CHEMICAL MODIFICATION; ELECTRONICS; FILM; OXIDATION; POLYMERIZATION;

EID: 13444260801 PISSN: 14394235 EISSN: None Source Type: Journal
DOI: 10.1002/cphc.200400373 Document Type: Article

Times cited : (16)

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