SCOPUS 정보 검색 플랫폼

Volumn 22, Issue 6, 2004, Pages 3032-3037

Alpha-prototype system for zone-plate-array lithography

Author keywords

[No Author keywords available]

Indexed keywords

ALPHA-PROTOTYPE SYSTEM; GRATING LIGHT VALVE (GLV); NUMERICAL APERTURE (NA); ZONE-PLANE-ARRAY LITHOGRAPHY (ZPAL);

COST EFFECTIVENESS; ELECTRON BEAMS; LIGHT MODULATION; LIGHTING; MATRIX ALGEBRA; MULTIPLEXING; PHOTORESISTORS;

LITHOGRAPHY;

EID: 13244290279 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1813464 Document Type: Conference Paper

Times cited : (22)

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