Lithographic patterning and confocal imaging with zone plates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 2881-2885

  Gil, Daŕio ^a   Menon, Rajesh ^a   Carter, D J D ^a   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING TECHNIQUES; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SUBSTRATES; ULTRAVIOLET RADIATION;

ZONE-PLATE-ARRAY SCANNING-CONFOCAL MICROSCOPY (ZPAM); ZONE-PLATE-ARRAY-LITHOGRAPHY (ZPAL);

LITHOGRAPHY;

EID: 0034314708     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1321293     Document Type: Article

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