Maskless, parallel patterning with zone-plate array lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3449-3452

  Carter, D J D ^a   Gil, Dario ^a   Menon, Rajesh ^a   Mondol, Mark K ^a   Smith, Henry I ^a   Anderson, Erik H ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033273528     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591028     Document Type: Article

References (12)

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