Coaxial microwave excitation device to ionize vapor sputtered by the magnetron;Dispositif coaxial d'excitation micro-ondes pour l'ionisation de vapeur pulvérisée par magnétron

Vide: Science, Technique et Applications

Volumn 2 4, Issue 304, 2002, Pages 272-283+237+430

  Boisse Laporte, Caroline ^b   Leroy, O ^b   De Poucques, L ^b   Teule Gay L ^b   Hagelaar, J H A ^b   Kouassi, N ^b   Pagnon, D ^b   Gousset, G ^b   Alves, L ^a   Leprince, P ^b   Bretagne, J ^b   Touzeau, M ^b  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^b UNIVERSITÉ PARIS SUD   (France)

Author keywords

Langmuir probe; Low pressure discharge; Optical spectroscopy; Planar magnetron discharge Microwave discharge; Sputtering

Indexed keywords

CARRIER CONCENTRATION; CHROMIUM; DEPOSITION; IONIZATION; LIGHT ABSORPTION; MAGNETRON SPUTTERING; PRESSURE EFFECTS; THIN FILMS;

LANGMUIR PROBES; LOW PRESSURE DISCHARGE; OPTICAL SPECTROSCOPY; PLANAR MAGNETRON DISCHARGE;

PLASMA DEVICES;

EID: 1242313297     PISSN: 12660167     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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