Characterization of magnetron-sputtered partially ionized deposition as a function of metal and gas species

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 3, 2000, Pages 797-801

  Allain, Monica M C ^a   Hayden, D B ^a   Juliano, D R ^a   Ruzic, D N ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ASPECT RATIO; CATHODES; COPPER; IONIZATION; KRYPTON; MAGNETRON SPUTTERING; NEON; PLASMA APPLICATIONS; QUARTZ APPLICATIONS; SUBSTRATES; TITANIUM;

INDUCTIVELY COUPLED PLASMAS (ICP); QUARTZ CRYSTAL MICROBALANCE (QCM);

SPUTTER DEPOSITION;

EID: 0034187025     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582257     Document Type: Article

References (18)

1. S. M. Rossnagel, Semicond. Int. 99 (1996).
2. S. M. Rossnagel, D. Mikalsen, H. Kinoshita, and J. J. Cuomo, J. Vac. Sci. Technol. A 9, 261 (1991).
3. S. M. Rossnagel, J. Vac. Sci. Technol. B 16, 2585 (1998).
4. M. Yamashita, J. Vac. Sci. Technol. A 7, 151 (1989).
5. P. F. Cheng, S. M. Rossnagel, and D. N. Ruzic, J. Vac. Sci. Technol. B 13, 203 (1995).
6. D. B. Hayden, D. R. Juliano, K. M. Green, D. N. Ruzic, C. A. Weiss, K. A. Ashtiani, and T. J. Licata, J. Vac. Sci. Technol. A 16, 624 (1998).
7. K. M. Green, D. B. Hayden, D. R. Juliano, and D. N. Ruzic, Rev. Sci. Instrum. 68, 4555 (1997).
8. M. B. Hendricks, P. C. Smith, and D. N. Ruzic, J. Vac. Sci. Technol. A 12, 1408 (1994).
9. S. M. Rossnagel and H. R. Kaufman, J. Vac. Sci. Technol. A 6, 223 (1988).
10. S. M. Rossnagel, J. Vac. Sci. Technol. A 6, 19 (1998).
11. D. N. Ruzic, Nucl. Instrum. Methods Phys. Res. B 47, 118 (1990).
12. H. H. Andersen and H. L. Bay, in Sputtering by Particle Bombardment I, edited by R. Behrisch (Springer, Berlin, 1981), p. 145.
13. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, Berlin, 1991).
14. D. R. Juliano, Ph.D. thesis. University of Illinois, 1999.
15. S. Zhen and G. J. Davies, Phys. Status Solidi A 78, 595 (1983).
16. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids, edited by J. F. Ziegler (Pergamon, New York, 1985), Vol. 1.
17. S. M. Rossnagel and J. Hopwood, Appl. Phys. Lett. 63, 3285 (1993).
18. S. M. Rossnagel and J. Hopwood, J. Vac. Sci. Technol. B 12, 449 (1994).