Optimization of the fabrication of sealed capacitive transducers using surface micromachining

Journal of Micromechanics and Microengineering

Volumn 14, Issue 2, 2004, Pages 299-304

  Belgacem, B ^a,b   Alquier, D ^a   Muralt, P ^c   Baborowski, J ^c   Lucas, S ^a   Jerisian, R ^a  

^a LMP   (France)

^b STMICROELECTRONICS   (France)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC FORCE; LASER INTERFERENCE MEASUREMENTS; VACUUM SEALING;

BANDWIDTH; CAPACITORS; DEPOSITION; ELECTRIC POTENTIAL; ETCHING; MICROMACHINING; NATURAL FREQUENCIES; OPTIMIZATION; PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; STRESS ANALYSIS; ULTRASONICS;

PIEZOELECTRIC TRANSDUCERS;

EID: 1242287838     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/2/019     Document Type: Article

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