Polarization-controlled monolithic oxide-confined VCSELs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5453, Issue , 2004, Pages 182-196

  Michalzik, Rainer ^a   Ostermann, Johannes Michael ^a   Debernardi, Pierluigi ^b   Jalics, Christof ^a   Kroner, Andrea ^a   Feneberg, Martin ^a   Riedl, Michael ^a  

^a UNIVERSITY OF ULM   (Germany)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

Emission far field; Polarization; Single mode; Surface grating; Surface relief; Transverse modes; VCSEL

Indexed keywords

ABSORPTION SPECTROSCOPY; BIREFRINGENCE; DATA TRANSFER; DRY ETCHING; ELECTROOPTICAL EFFECTS; LIGHT POLARIZATION; MULTIPLEXING; OPTICAL COMMUNICATION;

EMISSION FAR-FIELD; SINGLE MODE; SURFACE GRAFTING; SURFACE RELIEF; TRANSVERSE MODES; VERTICAL-CAVITY SURFACE-EMITTING LASERS (VCSEL);

SEMICONDUCTOR LASERS;

EID: 12344252999     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.554945     Document Type: Conference Paper

References (54)

1. C.J. Chang-Hasnain, J.P. Harbison, L.T. Florez, and N.G. Stoffel, "Polarisation characteristics of quantum well vertical cavity surface emitting lasers", Electron. Lett. 27, pp. 163-165, 1991.
2. G. Verschaffelt, K. Panajotov, J. Albert, B. Nagler, M. Peeters, J. Danckaert, I. Veretennicoff, and H. Thienpont, "Polarisation switching in vertical-cavity surface-emitting lasers: from experimental observations to applications", Opto-Electron. Rev. 9, pp. 257-268, 2001.
3. T. Ackemann and M. Sondermann, "Characteristics of polarization switching from the low to the high frequency mode in vertical-cavity surface emitting lasers", Appl. Phys. Lett. 78, pp. 3574-3576, 2001.
4. Y. Hong, K.A. Shore, A. Larsson, M. Ghisoni, and J. Halonen, "Polarisation switching in a vertical cavity surface emitting semiconductor laser by frequency detuning", IEE Proc.-Optoelectron. 148, pp. 31-34, 2001.
5. K. Panajotov, B. Nagler, G. Verschaffelt, A. Georgievski, H. Thienpont, J. Danckaert, and I. Veretennicoff, "Impact of in-plane anistropic strain on the polarization behavior of vertical-cavity surface-emitting lasers", Appl. Phys. Lett. 77, pp. 1590-1592, 2000.
6. T. Erneux, J. Danckaert, K. Panajotov, and I. Veretennicoff, "Two-variable reduction of the San Miguel-Feng-Moloney model for vertical-cavity surface-emitting lasers", Phys. Rev. A 59, pp. 4660-4667, 1999.
7. B.S. Ryvkin and A.M. Georgievski, "Polarization selection in VCSELs due to current carrier heating", Semiconductors 33, pp. 813-819, 1999.
8. B. Ryvkin, K. Panajotov, A. Georgievski, J. Danckaert, M. Peeters, G. Verschaffelt, H. Thienpont, and I. Veretennicoff, "Effect of photon-energy-dependent loss and gain mechanismus on polarization switching in vertical-cavity surface-emitting lasers", J. Opt. Soc. Am. B 16, pp. 1-8, 1999.
9. K. Panajotov, B. Ryvkin, J. Danckaert, M. Peeters, H. Thienpont, and I. Veretennicoff, "Polarization switching in VCSEL's due to thermal lensing", IEEE Photon. Technol. Lett. 10, pp. 6-8, 1998.
10. A. Valle, L. Pesquera, and K.A. Shore, "Polarization behavior of birefringent multitransverse mode vertical-cavity surface-emitting lasers", IEEE Photon. Technol. Lett. 9, pp. 557-559, 1997.
11. J. Martín-Regalado, S. Balle, and M. San Miguel, "Polarization and transverse-mode dynamics of gain-guided vertical-cavity surface-emitting lases", Opt. Lett. 22, pp. 460-462, 1997.
12. A. Valle, K. Shore, and L. Pesquera, "Polarization selection in birefringent vertical-cavity surface-emitting lasers", J. Lightwave Technol. 14, pp. 2062-2068, 1996.
13. J. Martín-Regalado, M. San Miguel, and N.B. Abraham, "Polarization switching in quantum-well vertical-cavity surface-emitting lasers", Opt. Lett. 21, pp. 351-353, 1996.
14. D.V. Kuksenkov, H. Temkin, and S. Swirhun, "Polarization instability and relative intensity noise in vertical-cavity surface-emitting lases", Appl. Phys. Lett. 67, pp. 2141-2143, 1995.
15. M. San Miguel, Q. Feng, and J.V. Moloney, "Light-polarization dynamics in surface-emitting semiconductor lasers", Phys. Rev. A 52, pp. 1728-1739, 1995.
16. M.P. van Exter, A.K. Jansen van Doom, and J.P. Woerdman, "Electro-optic effect and birefringence in semiconductor vertical-cavity lasers", Phys. Rev. A 56, pp. 845-853, 1997.
17. A.K. Jansen van Doom, M.P. van Exter, and J.P. Woerdman, "Strain-induced birefringence in vertical-cavity semiconductor lasers", IEEE J. Quantum Electron. 34, pp. 700-706, 1998.
18. IEEE Standard 802.3ae™, IEEE, Piscataway, NJ, USA, June 2002. See URL http://grouper.ieee.org/groups/802/3/ae/.
19. R. Michalzik, H. Roscher, M. Stach, D. Wiedenmann, M. Miller, J. Broeng, A. Petersson, N.A. Mortensen, H.R. Simonsen, and E. Kube, "Recent progress in short-wavelength VCSEL-based optical interconnections", in Semiconductor Optoelectronic Devices for Lightwave Communication, J. Piprek (Ed.), Proc. SPIE 5248, pp. 117-126, 2003.
20. R. Michalzik, F. Mederer, H. Roscher, M. Stach, H. Unold, D. Wiedenmann, R. King, M. Grabherr, and E. Kube, "Design and communication applications of short-wavelength VCSELs", in Materials and Devices for Optical and Wireless Communications, C.J. Chang-Hasnain, Y. Xia, and K. Iga (Eds.), Proc. SPIE 4905, pp. 310-321, 2002.
21. T. Yoshikawa, T. Kawakami, H. Saito, H. Kosaka, M. Kajita, K. Kurihara, Y. Sugimoto, and K. Kasahara, "Polarization-controlled single-mode VCSEL", IEEE J. Quantum Electron. 34, pp. 1009-1015, 1998.
22. T. Yoshikawa, H. Kosaka, K. Kurihara, M. Kajita, Y. Sugimoto, and K. Kasahara, "Complete polarization control of 8 × 8 vertical-cavity surface-emitting laser matrix arrays", Appl. Phys. Lett. 66, pp. 908-910, 1995.
23. H.Y. Chu, B.-S. Yoo, M.S. Park, and H.-H. Park, "Polarization characteristics of index-guided surface-emitting lasers with tilted pillar structure", IEEE Photon. Technol. Lett. 9, pp. 1066-1068, 1997.
24. C.L. Chua, R.L. Thornton, D.W. Treat, and R.M. Donaldson, "Anisotropic apertures for polarization-stable laterally oxidized vertical-cavity lasers", Appl. Phys. Lett. 73, pp. 1631-1633, 1998.
25. K.D. Choquette and R.E. Leibenguth, "Control of vertical-cavity laser polarization with anisotropic transverse cavity geometries", IEEE Photon. Technol. Lett. 8, pp. 40-42, 1994.
26. B. Weigl, M. Grabherr, C. Jung, R. Jäger, G. Reiner, R. Michalzik, D. Sowada, and K.J. Ebeling, "High-performance oxide-confined GaAs VCSEL's", IEEE J. Selected Topics Quantum Electron. 3, pp. 409-415, 1997.
27. K.-H. Ha, Y.-H. Lee, H.-K. Shin, K.-H. Lee, and S.-M. Whang, "Polarisation anisotropy in asymmetric oxide aperture VCSELs", Electron. Lett. 34, pp. 1401-1402, 1998.
28. M. Takahashi, P. Vaccaro, N. Egami, A. Mizutani, A. Matsutani, F. Koyama, and K. Iga, "Oxide-confinement vertical-cavity surface-emitting lasers grown on GaAs (311)A substrates with dynamically stable polarisation", Electron. Lett. 34, pp. 276-278, 1998.
29. N. Nishiyama, M. Arai, S. Shinada, M. Azuchi, T. Miyamoto, F. Koyama, and K. Iga, "Highly strained GaInAs-GaAs quantum-well vertical-cavity surface-emitting laser on GaAs (311)B substrate for stable polarization operation", IEEE J. Selected Topics Quantum Electron. 7, pp. 242-248, 2001.
30. O. Tadanaga, K. Tateno, H. Uenohara, T. Kagawa, and C. Amano, "An 850-nm InAlGaAs strained quantum-well vertical-cavity surface-emitting laser grown on GaAs (311)B substrate with high-polarization stability", IEEE Photon. Technol. Lett. 12, pp. 942-944, 2000.
31. N. Nishiyama, A. Mizutani, N. Hatori, M. Arai, F. Koyama, and K. Iga, "Lasing characteristics of InGaAs-GaAs polarization controlled vertical-cavity surface-emitting laser grown on GaAs (311)B substrate", IEEE J. Selected Topics Quantum Electron. 5, pp. 530-536, 1999.
32. Y. Kaneko, D.E. Mars, S. Nakagawa, Y. Ichimura, and N. Yamada, "Vertical-cavity surface-emitting lasers with stable polarization grown on (411)A-oriented GaAs substrates", J. Appl. Phys. 38, pp. L864-L866, 1999.
33. G. Verschaffelt, W. van der Vleuten, M. Creusen, E. Smalbrugge, T.G. van de Roer, F. Karouta, R. Strijbos, J. Danckaert, I. Veretennicoff, B. Ryvkin, H. Thienpont, and G.A. Acket, "Polarization stabilization in vertical-cavity surface-emitting lasers through asymmetric current injection", IEEE Photon. Technol. Lett. 12, pp. 945-947, 2000.
34. F. Monti di Sopra, M. Brunner, and R. Hövel, "Polarization control in strained T-bar VCSELs", IEEE Photon. Technol. Lett. 14, pp. 1034-1036, 2002.
35. L.J. Sargent, J.M. Rorison, M. Kuball, R.V. Penty, I.H. White, S.W. Corzine, M.R.T. Tan, S.Y. Wang, and P.J. Heard, "Investigation of polarization-pinning mechanism, in deep-line-etched vertical-cavity surface-emitting lasers", Appl. Phys. Lett. 76, pp. 400-402, 2000.
36. P. Dowd, P.J. Heard, J.A. Nicholson, L. Raddatz, I.H. White, R.V. Penty, J.C.C. Day, G.C. Allen, S.W. Corzine, and M.R.T. Tan, "Complete polarisation control of GaAs gain-guided top-surface emitting vertical cavity lasers", Electron. Lett. 33, pp. 1315-1317, 1997.
37. T. Mukaihara, F. Koyama, and K. Iga, "Engineered polarization control of GaAs/AlGaAs surface-emitting laser by anisotropic stress from elliptical etched substrate hole", IEEE Photon. Technol. Lett. 5, pp. 133-135, 1993.
38. M. Shimuzi, T. Mukaihara, F. Koyama, and K. Iga, "Polarisation control for surface emitting lasers", Electron. Lett. 27, pp. 1067-1069, 1991.
39. C.-A. Berseth, B. Dwir, I. Utke, H. Pier, A. Rudra, V.P. Iakovlev, E. Kapon, and M. Moser, "Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography", J. Vac. Sci. Technol. B 17, pp. 3222-3224, 1999.
40. Y.-G. Ju, J.-H. Ser, and Y.-H. Lee, "Analysis of metal-interlaced-grating vertical-cavity surface-emitting lasers using the modal method by modal expansion", IEEE J. Quantum Electron. 33, pp. 589-595, 1997.
41. J.-H. Ser, Y.-G. Ju, J.-H. Shin, and Y. H. Lee, "Polarization stabilization of vertical-cavity top-surface-emitting lasers by inscription of fine metal-interlaced gratings", Appl. Phys. Lett. 66, pp. 2769-2771, 1995.
42. T. Mukaihara, N. Ohnoki, Y. Hayashi, N. Hatori, F. Koyama, and K. Iga, "Polarization control of vertical-cavity surface-emitting lasers using a birefringent metal/dielectric polarizer loaded on top of distributed Bragg reflector", IEEE J. Selected Topics Quantum Electron. 1, pp. 667-673, 1995.
43. H.J. Unold, M.C. Riedl, R. Michalzik, and K.J. Ebeling, "Polarisation control in VCSELs by elliptic surface etching", Electron. Lett. 38, pp. 77-78, 2002.
44. P. Debernardi, H.J. Unold, J. Mähnß. R. Michalzik, G.P. Bava, and K.J. Ebeling, "Single-mode, single-polarization VCSELs via elliptical surface etching: experiments and theory", IEEE J. Selected Topics Quantum Electron. 9, pp. 1394-1405, 2003.
45. D.S. Song, Y.-J. Lee, H.-W. Choi, and Y.-H. Lee, "Polarization-controlled, single-transverse-mode, photonic-crystal, vertical-cavity, surface-emitting lasers", Appl. Phys. Lett. 82, pp. 3182-3184, 2003.
46. M.S. Park, B.T. Ahn, B.-S. Yoo, H.Y. Chu, H.-H. Park, and C.J. Chang-Hasnain, "Polarization control of vertical-cavity surface-emitting lasers by electro-optic birefringence", Appl. Phys. Lett. 76, pp. 813-815, 2000.
47. C.I. Wilkinson, J. Woodhead, J.E.F. Frost, J.S. Roberts, R. Wilson, and M.F. Lewis, "Electrical polarization control of vertical-cavity surface-emitting lasers using polarized feedback and a liquid crystal", IEEE Photon. Technol. Lett. 11, pp. 155-157, 1999.
48. T.H. Russell and T.D. Milster, "Polarization switching control in vertical-cavity surface-emitting lasers", Appl. Phys. Lett. 70, pp. 2520-2522, 1997.
49. F. Robert, P. Besnard, M.-L. Charès, and G.M. Stephan, "VCSEL-polarisation control with polarised feedback", IEE Proc.-Optoelectron. 143, pp. 104-106, 1996.
50. J.M. Ostermann, P. Debernardi, C. Jalics, A. Kroner, M. Feneberg, M. Riedl, and R. Michalzik, "Monolithic polarization control of multimode VCSELs by a dielectric surface grating", in Vertical-Cavity Surface-Emitting Lasers VIII, C. Lei and S.P. Kilcoyne (Eds.), Proc. SPIE 5364, paper 27, 2004, in press.
51. G.P. Bava, P. Debernardi, and L. Fratta, "Three-dimensional model for vectorial fields in vertical-cavity surface-emitting lasers", Phys. Rev. A 63, pp. 023816-1-023816-13, 2001.
52. P. Debernardi and G.P. Bava, "Coupled mode theory: a powerful tool for analyzing complex VCSELs and designing advanced device features", IEEE J. Selected Topics Quantum Electron. 9, pp. 905-917, 2003.
53. H.J. Unold, S.W.Z. Mahmoud, R. Jäger, M. Golling, M. Kicherer, F. Mederer, M.C. Riedl, T. Knödl, M. Miller, R. Michalzik, and K.J. Ebeling, "Single-mode VCSELs", in Vertical-Cavity Surface-Emitting Lasers VI, C. Lei and S.P. Kilcoyne (Eds.), Proc. SPIE 4649, pp. 218-229, 2002.
54. Å. Haglund, J.S. Gustavsson, J. Vukušić, P. Modh, and A. Larsson, "Single fundamental mode output power exceeding 6 mW from VCSELs with a shallow surface relief", IEEE Photon. Technol. Lett. 16, pp. 368-370, 2004.