Single-Mode, Single-Polarization VCSELs via Elliptical Surface Etching: Experiments and Theory

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 9, Issue 5, 2003, Pages 1394-1405

  Debernardi, Pierluigi ^a   Unold, Heiko J ^b   Maehnss, Juergen ^c   Michalzik, Rainer ^c   Bava, Gian Paolo ^a   Joachim Ebeling, Karl ^c,d  

^a POLITECNICO DI TORINO   (Italy)

^b ETH ZURICH   (Switzerland)

^c UNIVERSITY OF ULM   (Germany)

^d INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Birefringence; Polarization control; Single mode; Vectorial fields; Vertical cavity surface emitting lasers (VCSELs)

Indexed keywords

ANISOTROPY; BIREFRINGENCE; COMPUTER SIMULATION; ETCHING; MATHEMATICAL MODELS; OPTIMIZATION; POLARIZATION; SEMICONDUCTOR MATERIALS; SEMICONDUCTOR QUANTUM WELLS;

POLARIZATION CONTROL; SINGLE MODE; VECTORIAL FIELDS; VERTICAL-CAVITY SURFACE-EMITTING LASERS (VCSEL);

QUANTUM ELECTRONICS;

EID: 1342324775     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2003.819487     Document Type: Conference Paper

References (44)

1. K. L. Lear, V. M. Hietala, H. Q. Hou, M. Ochiai, J. J. Banas, B. E. Hammons, J. C. Zolper, and S. P. Kilcoyne, "Small and large signal modulation of 850 nm oxide-confined vertical cavity surface emitting lasers," in OSA Trends in Optics and Photonics (Advances in Vertical Cavity Surface Emitting Lasers), C. J. Chang-Hasnain, Ed. Washington, DC: Opt. Soc. Amer., 1997, vol. 15, pp. 69-74.
2. M. Miller, M. Grabherr, R. King, R. Jäger, R. Michalzik, and K. J. Ebeling, "Improved output performance of high-power VCSELs," IEEE J. Select. Topics Quantum Electron., vol. 7, pp. 210-216, Mar./Apr. 2001.
3. F. Monti di Sopra, H. P. Zappe, M. Moser, R. Hövel, H.-P. Gauggel, and K. Gulden, "Near-infrared vertical-cavity surface-emitting lasers with 3-MHz linewidths," IEEE Photon. Technol. Lett., vol. 11, pp. 1533-1535, Dec. 1999.
4. W. Schmid, C. Jung, B. Weigl, G. Reiner, R. Michalzik, and K. J. Ebeling, "Delayed self-heterodyne linewidth measurement of VCSEL's," IEEE Photon. Technol. Lett., vol. 8, pp. 1288-1290, Oct. 1996.
5. D. Wiedenmann, P. Schnitzer, C. Jung, M. Grabherr, R. Jäger, R. Michalzik, and K. J. Ebeling, "Noise characteristics of 850 nm single-mode vertical cavity surface emitting lasers," Appl. Phys. Lett., vol. 73, pp. 717-719, 1998.
6. T. Yoshikawa, H. Kosaka, K. Kurihara, M. Kajita, Y. Sugimoto, and K. Kasahara, "Complete polarization control of 8 * 8 vertical-cavity surface-emitting laser matrix arrays," Appl. Phys. Lett., vol. 66, pp. 908-910, 1995.
7. D. Sun, E. Towe, P. H. Ostdiek, J. W. Grantham, and G. J. Vansuch, "Polarization control of vertical-cavity surface-emitting lasers through use of an anisotropic gain distribution in (110)-oriented strained quantum-well structures," IEEE J. Select. Topics Quantum Electron., vol. 1, pp. 674-680, June 1995.
8. T. Mukaihara, N. Ohnoki, Y. Hayashi, N. Hatori, F. Koyama, and K. Iga, "Polarization control of vertical-cavity surface emitting lasers using a birefringent metal/dielectric polarizer loaded on top distributed Bragg reflector," IEEE J. Select. Topics Quantum Electron., vol. 1, pp. 667-673, 1995.
9. U. Fiedler, D. Wiedenmann, B. Weigl, C. Jung, G. Reiner, M. Buck, and K. J. Ebeling, "High frequency behavior of oxidized single-mode single polarization VCSEL's with elliptical current aperture," in Proc. LEOS'96, vol. 1, pp. 211-12.
10. S. J. Schablitsky, Z. Lei, R. C. Shi, and S. Y. Chou, "Controlling polarization of vertical-cavity surface-emitting lasers using amorphous silicon subwavelength transmission gratings," Appl. Phys. Lett., vol. 69, pp. 7-9, 1996.
11. T. Yoshikawa, T. Kawakami, S. Saito, H. Kosaka, M. Kajita, K. Kurihara, Y. Sugimoto, and K. Kasahara, "Polarization-controlled single-mode VCSEL," IEEE J. Quant. Electron., vol. 34, pp. 1009-1015, June 1998.
12. C. A. Berseth, B. Dwir, I. Utke, H. Pier, A. Rudra, V. P. Iakovlev, and E. Kapon, "Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography," J. Vac. Sci. Technol. B, vol. 17, no. 6, pp. 3222-3225, 1999.
13. N. Nishiyama, A. Mizutani, N. Hatori, M. Arai, F. Koyama, and K. Iga, "Lasing characteristics of InGaAs-GaAs polarization controlled vertical-cavity surface-emitting laser grown on GaAs (311) B substrate," IEEE J. Select. Topics Quantum Electron., vol. 5, pp. 530-536, May/June 1999.
14. Y. Kaneko, D. Mars, S. Nakagawa, Y. Ichimura, and N. Yamada, "Vertical-cavity surface-emitting lasers with stable polarization grown on (411)a-oriented substrates," Jpn. J. Appl. Phys., vol. 38, no. 8A, pp. 864-866, 1999.
15. H. H. Kyoung and H. L. Yong, "Polarization control of vertical-cavity surface-emitting lasers by asymmetric oxide-aperture," in Tech. Dig. 1335, CLEO/Pacific Rim'99, vol. 3, pp. 890-891.
16. H. Uenohara, K. Tateno, T. Kagawa, Y. Ohiso, H. Tsuda, T. Kurokawa, and C. Amano, "Polarization-controlled 850-nm-wavelength vertical-cavity surface-emitting lasers grown on (311)B substrates by metal-organic chemical vapor deposition," IEEE J. Select. Topics Quantum Electron., vol. 5, pp. 537-545, May/June 1999.
17. _, "Investigation of dynamic polarization stability of 850-nm GaAs-based vertical-cavity surface-emitting lasers grown on (311)B and (100) substrates," IEEE Photon. Technol. Lett., vol. 11, pp. 400-402, Apr. 1999.
18. O. Tadanaga, K. Tateno, H. Uenohara, T. Kagawa, and C. Amano, "An 850-nm InAlGaAs strained quantum-well vertical-cavity surface-emitting laser grown on GaAs (311)B substrate with high-polarization stability," IEEE Photon. Technol. Lett., vol. 12, pp. 942-944, Aug. 2000.
19. S. P. Min, T. A. Byung, S. Y. Byueng, Y. C. Hye, P. H. Hyo, and C. J. H. Chang, "Polarization control of vertical-cavity surface-emitting lasers by electro-optic birefringence," Appl. Phys. Lett., vol. 76, pp. 813-815, 2000.
20. K. Panajotov, J. Danckaert, G. Verschaffelt, M. Peeters, B. Nagler, J. Albert, B. Ryvkin, H. Thienpont, and I. Veretennicoff, "Polarization behavior of vertical-cavity surface-emitting lasers: Experiments, models, and applications," in Proc. AIP, vol. 560, 2001, pp. 403-417. Nanoscale and Nonlinear Optics International School on Quantum Electronics.
21. B. S. Ryvkin, E. A. Avrutin, and A. C. Walker, "Current-directionality-induced giant absorption dichroism in III-V semiconductors and its potential for polarization control in vertical cavity surface-emitting lasers," J. Appl. Phys., vol. 91, pp. 3516-3521, 2002.
22. E. W. Young, K. D. Choquette, S. L. Chuang, K. M. Geib, A. J. Fischer, and A. A. Allerman, "Single-transverse-mode vertical-cavity lasers under continuous and pulsed operation," IEEE Photon. Technol. Lett., vol. 13, pp. 927-9, 2001.
23. H. J. Unold, S. W. Z. Mahmoud, R. Jäger, M. Kicherer, and K. J. Ebeling, "Improving single-mode VCSEL performance by introducing a long monolithic cavity," IEEE Photon. Technol. Lett., vol. 12, pp. 939-941, Aug. 2000.
24. H. J. Unold, M. Gelling, F. Mederer, R. Michalzik, D. Supper, and K. J. Ebeling, "Singlemode output power enhancement of InGaAs VCSEL's by reduced spatial hole burning via surface etching," Electron. Lett., vol. 37, pp. 570-571, Sept. 2001.
25. G. Verschaffelt, M. vander Vleuten, M. Creusenm, E. Smalbrugge, T. G. van de Roer, F. Karouta, R. C. Strijbos, J. Danckaert, I. Veretennicoff, B. Ryvkin, H. Thiepont, and G. A. Acket, "Polarization stabilization in vertical cavity surface emitting lasers through asymmetric current injection," IEEE Photon. Technol. Lett., vol. 12, pp. 945-947, Aug. 2000.
26. M. Ortsiefer, R. Shau, M. Zigldrum, G. Böhm, F. Köhler, and M. C. Amann, "Submilliamp long-wavelength InP-based vertical-cavity surface-emitting lasers with stable polarization," Electron. Lett., vol. 36, pp. 1124-1126, 2000.
27. B. Weigl, M. Grabherr, C. Jung, R. Jäger, G. Reiner, R. Michalzik, D. Sowada, and K. J. Ebeling, "High-performance oxide-confined GaAs VCSEL's," IEEE J. Select. Topics Quantum Electron., vol. 3, pp. 409-415, Mar./Apr. 1997.
28. K. D. Choquette and R. Leibenguth, "Control of vertical cavity laser polarization with anisotropic transverse cavities," IEEE Photon. Technol. Lett., vol. 6, pp. 40-42, Jan. 1994.
29. H. J. Unold, M. C. Riedl, R. Michalzik, and K. J. Ebeling, "Polarization control in VCSEL's by elliptic surface etching," Electron. Lett., vol. 38, pp. 77-78, 2002.
30. H. J. Unold, S. W. Z. Mahmoud, R. Jäger, M. Grabherr, R. Michalzik, and K. J. Ebeling, "Large-area single-mode VCSEL's and the self-aligned surface relief," IEEE J. Select. Topics Quantum Electron., vol. 7, pp. 386-392, Mar./Apr. 2001.
31. G. P. Bava, P. Debernardi, and L. Fratta, "Three-dimensional model for vectorial fields in vertical-cavity surface-emitting lasers," Phys. Rev. A, vol. 63, no. 23 816, 2001.
32. P. Debernardi, G. P. Bava, C. Degen, I. Fischer, and W. Elsäßer, "Influence of anisotropies on transverse modes in oxide-confined VCSEL's," IEEE J. Quantum Electron., vol. 38, pp. 73-84, Jan. 2002.
33. K. Panajotov, M. Camarena, M.-C. Moreno, H. J. Unold, R. Michalzik, H. Thienpont, J. Danckaert, I. Veretennicoff, and G. Verschaffelt, "Polarization behavior and mode structure of vertical-cavity surface-emitting lasers with elliptical surface relief," in Vertical-Cavity Surface-Emitting Lasers VII (Proc. SPIE), C. Lei and S. P. Kilcoyne, Eds., vol. 4994, to be published.
34. M. P. van Exter, A. K. Jansen van Doorn, and J. P. Woerdman, "Electrooptic effect and birefringence in semiconductor vertical-cavity lasers," Phys. Rev. A, vol. 56, no. 845, 1997.
35. D. W. Winston and R. E. Hayes, "Optoelectronic device simulation of bragg reflectors and their influence on surface-emitting lasers characteristics," IEEE J. Quantum Electron., vol. 34, pp. 707-715, Apr. 1998.
36. G. Giacomelli, F. Marin, M. Babrysch, K. Gulden, and M. Moser, "Polarization competition and noise properties of VCSELs," Opt. Commun., vol. 146, pp. 136-140, 1998.
37. S. Balle, E. Tolkachova, M. San-Miguel, J. R. Tredicce, J. Martin-Regalado, and A. Gahl, "Mechanisms of polarization switching in single-transverse-mode vertical-cavity surface-emitting lasers: Thermal shift and nonlinear semiconductor dynamics," Opt. Lett., vol. 24, pp. 1121-1123, 1999.
38. M. B. Willemsen, M. P. van Exter, and J. P. Woerdman, "Anatomy of a polarization switch of a vertical-cavity semiconductor laser," Phys. Rev. Lett., vol. 84, pp. 4337-4340, 2000.
39. T. Ackemann and M. Sondermann, "Characteristics of polarization switching from the low to the high frequency mode in vertical-cavity surface-emitting lasers," Appl. Phys. Lett., vol. 78, pp. 3574-3576, 2001.
40. G. Verschaffelt, K. Panajotov, J. Albert, B. Nagler, M. Peeters, J. Danckaert, I. Veretennicoff, and H. Thienpont, "Polarization switching in vertical-cavity surface-emitting lasers: From experimental observations to applications," Opto Electron. Rev., vol. 9, pp. 257-268, 2001.
41. P. Debernardi and G. P. Bava, "Vectorial modes in vertical-cavity surface-emitting lasers in presence of anisotropies," Phys. Status Solidi (a), vol. 188, no. 3, pp. 967-977, 2001.
42. P. Debernardi, G. P. Bava, F. Monti di Sopra, and M. B. Willemsen, "Features of vectorial modes in phase-coupled VCSEL' s arrays: Experiments and theory," IEEE J. Quantum Electron., vol. 39, pp. 109-119, Jan. 2003.
43. Y. G. Ju, J. H. Ser, and Y. H. Lee, "Analysis of metal-interlaced-grating vertical-cavity surface-emitting lasers using the modal method by modal expansion," IEEE J. Quantum Electron., vol. 33, pp. 589-595, Apr. 1997.
44. P. Debernardi and G. P. Bava, "Coupled mode theory: A powerful tool for analyzing complex VCSEL's and designing advanced devices features," IEEE J. Select. Topics Quantum Electron., vol. 9, pp. 905-917, May/June 2003.