High resolution elastic recoil detection

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 219-220, Issue 1-4, 2004, Pages 333-343

  Dollinger, G ^a   Bergmaier, A ^a   Goergens, L ^a   Neumaier, P ^a   Vandervorst, W ^b   Jakschik, S ^c  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b IMEC   (Belgium)

^c INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; ELASTICITY; ELECTRON MICROSCOPY; HYDROGEN; IMPURITIES; MONOLAYERS; SENSITIVITY ANALYSIS; SURFACE TREATMENT;

CRYSTALLINE ULTRA THIN LAYERS; ELASTIC RECOIL DETECTION (ERD); LIGHT ELEMENTS;

ULTRATHIN FILMS;

EID: 2442610485     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.01.079     Document Type: Conference Paper

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