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Review of Scientific Instruments

Volumn 75, Issue 11, 2004, Pages 4981-4988

Spatial and spectral characterization of a laser produced plasma source for extreme ultraviolet metrology

(8) Legall, H a Stiel, H a Vogt, U a,c Schonnagel H a Nickles, P V a Tummler J a,b Scholz, F b Scholze, F b

a MAX BORN INSTITUT (Germany)

b PHYSIKALISCH TECHNISCHE BUNDESANSTALT (Germany)

c RheinAhrCampus Remagen (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; DIFFRACTION GRATINGS; PHOTONS; RADIOMETRY; REFLECTOMETERS; ULTRAVIOLET DETECTORS; X RAY SPECTROSCOPY;

EXTREME ULTRAVIOLET METROLOGY; LASER PARAMETERS; LASER-TARGET INTERACTION; X-RAY RADIATION;

LASER PRODUCED PLASMAS;

EID: 10844290349 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.1807567 Document Type: Article

Times cited : (14)

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