EUV-emission of xenon-clusters excited by a high repetition rate burst mode laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4781, Issue , 2002, Pages 26-34

  Stiel, Holger ^a   Vogt, Ulrich ^a   Ter Avetysian, Sargis ^b   Schnürer, Matthias ^a   Will, Ingo ^a   Nickles, Peter V ^a  

^a MAX BORN INSTITUT   (Germany)

^b INSTITUTE FOR PHYSICAL RESEARCH   (Armenia)

Author keywords

EUV lithography; High average power lasers; Laser produced plasma; Xe cluster source

Indexed keywords

LASER PRODUCED PLASMAS; LASER PULSES; NEODYMIUM LASERS; PHOTOLITHOGRAPHY; PLASMA SOURCES; ULTRAVIOLET SPECTROSCOPY; XENON;

EXTREME ULTRAVIOLET LITHOGRAPHY; HIGH REPETITION RATE BURST MODE LASER; LASER PLASMA SOURCE; XENON CLUSTERS;

ULTRAVIOLET RADIATION;

EID: 0036980333     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.450965     Document Type: Conference Paper

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