Nano-scale patterning by mechano-chemical scanning probe lithography

Applied Surface Science

Volumn 239, Issue 2, 2005, Pages 209-221

  Sung, In Ha ^a   Kim, Dae Eun ^a  

^a Yonsei University   (South Korea)

Author keywords

Mechano chemical scanning probe lithography; Nano wear; Scanning probe microscope; Self assembled monolayers

Indexed keywords

ABRASIVES; ATOMIC FORCE MICROSCOPY; ETCHING; FRICTION; MACHINING; NANOTECHNOLOGY; SCANNING; SELF ASSEMBLY; SILICON; WEAR OF MATERIALS;

MECHANO-CHEMICAL SCANNING PROBE LITHOGRAPHY; NANO-SCALE PATTERNING; NANOWEAR; SCANNING PROBE MICROSCOPES;

LITHOGRAPHY;

EID: 10444242016     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.275     Document Type: Article

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