Vertical metrology using scanning-probe microscopes: Imaging distortions and measurement repeatability

Journal of Applied Physics

Volumn 83, Issue 8, 1998, Pages 3952-3971

  Edwards, Hal ^a   McGlothlin, Rudye ^a   UE , Elisa ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER AIDED ANALYSIS; IMAGE ANALYSIS; MEASUREMENT ERRORS; MICROSCOPES; POLYNOMIALS; STATISTICAL METHODS; SURFACE ROUGHNESS;

HISTOGRAM BASED METHOD; IMAGING DISTORTIONS; MANUAL SINGLE POINT METHOD; MEASUREMENT REPEATABILITY; POLYNOMIAL STEP FUNCTION FIT; SCANNING PROBE MICROSCOPY; VERTICAL METROLOGY;

MICROSCOPIC EXAMINATION;

EID: 0032046790     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367151     Document Type: Article

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