Determination of energy barrier profiles for high-k dielectric materials utilizing bias-dependent internal photoemission

Applied Physics Letters

Volumn 85, Issue 18, 2004, Pages 4133-4135

  Brewer, Julie Casperson ^a   Walters, Robert J ^a   Bell, L Douglas ^b   Farmer, Damon B ^c   Gordon, Roy G ^c   Atwater, Harry A ^a  

^a California Institute of Technology   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTION BANDS; ENERGY BARRIERS; INTERFACIAL LAYERS; INTERNAL PHOTOEMISSION SPECTROSCOPY;

ALUMINUM COMPOUNDS; CALIBRATION; GOLD; HAFNIUM COMPOUNDS; PERMITTIVITY; PHOTOEMISSION; SILICON; SPECTROSCOPIC ANALYSIS;

DIELECTRIC MATERIALS;

EID: 10044250154     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1812831     Document Type: Article

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