Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator

IEEE Transactions on Electron Devices

Volumn 51, Issue 1, 2004, Pages 149-155

  Oberhammer, Joachim ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Broadband switches; Microwave switches; Millimeter wave switches; RF MEMS

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; ELECTRODES; ELECTROSTATICS;

AUTOMATED TEST EQUIPMENT; BROADBAND SWITCHES; MICROWAVE SWITCHES; MILLIMETER WAVE SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 0742286721     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.820655     Document Type: Article

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