Micromachined relay which utilizes single crystal silicon electrostatic actuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 21-24

  Sakata, M ^a   Komura, Y ^a   Seki, T ^a   Kobayashi, K ^a   Sano, K ^a   Horiike, S ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC RELAYS; ELECTRIC RESISTANCE; ELECTROSTATIC DEVICES; MICROACTUATORS; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

MICROMACHINED RELAYS; SILICON ELECTROSTATIC ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032649447     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746745     Document Type: Conference Paper

References (3)