Developments in microelectromechanical systems (MEMS): A manufacturing perspective

Journal of Manufacturing Science and Engineering

Volumn 125, Issue 4, 2003, Pages 816-823

  Tadigadapa, Srinivas A ^a   Najafi, Nader ^b  

^a The Pennsylvania State University   (United States)

^b Integrated Sensing Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COST BENEFIT ANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RELIABILITY;

MICROELECTROMECHANICAL SYSTEMS; RELIABILITY TESTING;

MICROELECTRONIC PROCESSING;

EID: 0345377661     PISSN: 10871357     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1617286     Document Type: Article

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