Reflexions on the future of microsystems

Sensors and Actuators, A: Physical

Volumn 72, Issue 1, 1999, Pages 1-15

  Lang, Walter ^a,b,c,d,e  

^a Hahn Schickard Gesellschaft for Applied Research   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

^c TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^d Fraunhofer Institut fur Festkorpertechnologie   (Germany)

^e Inst Micromachining Info T   (Germany)

Author keywords

Future; Market; MEMS; Microsystems

Indexed keywords

COST ACCOUNTING; MARKETING; PRODUCTION ENGINEERING; RELIABILITY;

MICROELECTROMECHANICAL SYSTEMS (MEMS);

MICROELECTROMECHANICAL DEVICES;

EID: 0033534284     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00205-2     Document Type: Article

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