Challenges of the emerging microsystems industry

Microelectronics Journal

Volumn 29, Issue 9, 1998, Pages 587-600

  Ohlckers, Per ^a,b   Jakobsen, Henrik ^a  

^a SensoNor   (Norway)

^b UNIVERSITY OF OSLO   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MICROELECTRONIC PROCESSING; MICROELECTRONICS; SENSORS; TECHNOLOGY;

BATCH ORGANISED PROCESSING TECHNOLOGY; MANUFACTURING INFRASTRUCTURE; MICROSYSTEM INDUSTRY; SILICON MICROMACHINING;

ELECTRONICS INDUSTRY;

EID: 0032165003     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00022-6     Document Type: Article

References (24)

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5. A. Hanneborg, T.E. Hansen, P.A. Ohlckers, E. Carlson, B. Dahl, O. Holwech, An integrated capacitive pressure sensor with frequency-modulated output, Sensors and Actuators 9 (1986) 345-351.
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11. P. Ohlckers, B. Sundby Avset, A. Bjorneklett, L. Evensen, J. Gakkestad, A. Hanneborg, T. Hansen, A. Kjensmo, E. Kristiansen, H. Kristiansen, H. von der Lippe, M. Nese, E. Nygård, F. Serck-Hanssen, O. Søråsen, Industrial microelectronics toward the year 2000 - a report on objectives and results of a research collaboration at the Center for Industrial Research and the University of Oslo, Invited paper, ISHM - Nordic 30th Conference, Oslo, 20-23 September 1992. Appeared in Hybrid Circuits No. 32, September 1993, pp. 4-11.
12. P. Ohlckers, T. Gleditsch, A. Hanneborg, H. v.d. Lippe, Microsystems for instrumentation-presentation of SINTEF microelectronics, Oslo, Norway, VDI/VDE mst news, Berlin, No. 11 (1994) 3-5.
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14. A. Hanneborg, M. Nese, P. Ohlckers, Silicon-to-silicon anodic bonding, Journal of Micromechanical Engineering 1 (1991) 139-144.
15. A. Hanneborg, P. Ohlckers, F. Serck-Hanssen, Pressure sensor (Trykksensor), Norwegian patent application. Oslo, June 1994. Accepted December 1994.
16. R. Bernstein, A. Ferber, P. Ohlckers, Gas sensor (Gassdetektor), Norwegian patent application submitted in Oslo, January 1995. Norwegian patent approved in 1997.
17. R.W. Bernstein, A. Ferber, L. Furuberg, S.T. Moe, Development of a wavelength selective silicon infrared detector for gas sensor applications, Presentation at Sensor '97, Nurnberg, Germany, 13-15 May 1997.
18. P. Ohlckers, Kombinasjon av mikroelektronikk og mikromekanikk-en sterk teknologi (Combination of microelectronics and micromechanics-an excellent technology), Paper in Norwegian in ELEKTRO 2/1981, Ingeniørforlagets Pressebyrå.
19. L. Halbo, P. Ohlckers, Electronic Components, Packaging and Production, University of Oslo, December 1995, 330 pp.
20. Yet unpublished results from work by P. Ohlckers, B. Erik Seeberg, A. Larsen.
21. Data sheet: SA30 Crash Sensor; SensoNor asa. P.O. Box 196, N-3192 Horten, Norway.
22. J.B. Nysæther, A. Larsen, B. Liverød, P. Ohlckers, Measurement of packaged induced stress and thermal zero shift in transfer molded silicon piezoresistive pressure sensors, Technical Digest, MME '97, Micromechanics Europe 1997, Southampton, 1-2 September, pp. 219-222.
23. P. Ohlckers, R. Holm, H. Jakobsen, T. Kvisteroy, G. Kittilsland, M. Nese, S.M. Nilsen, A. Ferber, An integrated resonant accelerometer microsystem for automotive applications, Submitted paper presented at Transducers '97, Chicago, USA, 16-19 June 1997, pp. 843-846.
24. P. Ohlckers, S.-I. Hansen, H. Jakobsen, The emerging industry of micromachined devices, Invited presentation at the NORCHIP Conference, Tallinn, Eustonia, 10-11 November 1997. Included in the proceedings from the conference.