A feasibility study on the micro electro-discharge machining process for photomask fabrication

International Journal of Advanced Manufacturing Technology

Volumn 18, Issue 1, 2001, Pages 7-11

  Yeo, S H ^a   Yap, G G ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Micro electro discharge machining; Photomask; Rapid prototyping

Indexed keywords

COMPUTER AIDED MANUFACTURING; MASKS; MICROELECTRODES; MICROELECTROMECHANICAL DEVICES; RAPID PROTOTYPING;

MICRO ELECTRODISCHARGE MACHINING; PHOTOMASK FABRICATION;

ELECTRIC DISCHARGE MACHINING;

EID: 0034816173     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/PL00003950     Document Type: Article

References (7)

1. Micro electro-discharge machining and its applications
2. Fine line scribing of conductive material
3. Mask for high aspect ratio x-ray lithography
4. New opportunities for micro actuators
5. The printability of laser mask repairs at deep UV