Carbon nanotubes for microelectronics: Status and future prospects

Materials Science and Engineering C

Volumn 23, Issue 6-8, 2003, Pages 663-669

  Hoenlein, W ^a   Kreupl, F ^a   Duesberg, G S ^a   Graham, A P ^a   Liebau, M ^a   Seidel, R ^a   Unger, E ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Carbon nanotube field effect transistors; Carbon nanotube growth; Carbon nanotube vias; Carbon nanotubes; Silicon technology

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; MICROELECTRONICS; MOSFET DEVICES;

CARBON NANOTUBE FIELD EFFECT TRANSISTORS (CNTFET); SEMICONDUCTOR INDUSTRY;

CARBON NANOTUBES;

MICROELECTRONICS;

EID: 0344256511     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2003.09.153     Document Type: Article

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