Anthropomorphic tactile sensors for tactile feedback systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3206, Issue , 1997, Pages 82-97

  Schuenemann, Matthias ^a,b  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

^b Department of Ultrapure Engineering and Microfabrication Technology ^*  (Germany)

Author keywords

Anthropomorphic approach; Hybrid microelectromechanical systems; Microfabrication technologies; Tactile feedback system; Tactile sensor

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; FEEDBACK CONTROL; INDUSTRIAL RESEARCH; MACHINE DESIGN; MECHATRONICS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MICROMECHANICS; OPTICAL SENSORS; TECHNOLOGY; THREE DIMENSIONAL; VISUAL COMMUNICATION;

ANTHROPOMORPHIC APPROACH; HYBRID MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATION TECHNOLOGIES; TACTILE FEEDBACK SYSTEM; TACTILE SENSOR;

SENSORS;

EID: 0343369779     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295572     Document Type: Conference Paper

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