Semiconductor acceleration sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 288-295

  Ueyanagi, Katsumichi ^a   Kobayashi, Mitsuo ^a   Goto, Tomoaki ^a  

^a FUJI ELECTRIC CO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION SENSORS; AUTOMOTIVE AIR BAGS; PIEZORESISTORS; WHEATSTONE BRIDGE;

AUTOMOBILES; ELECTRIC MEASURING BRIDGES; ETCHING; GLASS; PLASMAS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; THERMAL EXPANSION;

ACCELEROMETERS;

EID: 0030393035     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)