Manufacturing concepts and development trends in the industrial production of microelectromechanical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3202, Issue , 1998, Pages 130-141

  Schuenemann, Matthias ^a   Grimme, Ralf ^a   Kaufmann, Thomas ^a   Schwaab, Gerhard ^a   Bader, Uwe ^a   Schaefer, Wolfgang ^a   Dorner, Johann ^a  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING ENGINEERING AND AUTOMATION IPA   (Germany)

Author keywords

Flexible Automation; Hybrid Microelectromechanical Systems; Industrial Production; Medium Sized Companies; Microfabrication Process Center; Microsystem Fabrication

Indexed keywords

AUTOMATION; CLEANING; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; FABRICATION; MECHATRONICS; MEMS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MICROMACHINING; MICROMECHANICS; MICROSYSTEMS; SOLID STATE DEVICES;

FLEXIBLE AUTOMATION; HYBRID MICROELECTROMECHANICAL SYSTEMS; INDUSTRIAL PRODUCTION; MEDIUM-SIZED COMPANIES; MICROFABRICATION PROCESS CENTER; MICROSYSTEM FABRICATION;

HYBRID SYSTEMS;

EID: 58849161788     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298030     Document Type: Conference Paper

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