Touch mode silicon capacitive pressure sensors

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 19, Issue , 1990, Pages 111-117

  Ding, Xiaoyi ^a   Tong, Li Jun ^a   He, Weihua ^a   Hsu, Jen Tai ^a   Ko, Wen H ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; SILICON AND ALLOYS--APPLICATIONS;

SILICON DIAPHRAGM CAPACITIVE PRESSURE SENSORS; TOUCH MODE-OPERATING SENSORS;

SENSORS;

EID: 0025623653     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)