Transition during the Growth of Nanoporous Columns in p-Type Silicon: The Origin of Macropores

Electrochemistry

Volumn 71, Issue 10, 2003, Pages 853-859

  Hamm, Didier ^a   Sakka, Tetsuo ^a   Ogata, Yukio H ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Anodic Dissolution; Faceted Substrate; Macropore; Porous Silicon

Indexed keywords

ANISOTROPY; CURRENT DENSITY; DISSOLUTION; MOLECULAR ORIENTATION; MORPHOLOGY; PHOTOLITHOGRAPHY; SILICON WAFERS;

ANODIC DISSOLUTION; MACROPORES;

POROUS SILICON;

EID: 0242443832     PISSN: 13443542     EISSN: None     Source Type: Journal    
DOI: 10.5796/electrochemistry.71.853     Document Type: Article

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