Formation of high aspect ratio macropore array on p-type silicon

Electrochemical and Solid-State Letters

Volumn 3, Issue 10, 2000, Pages 489-492

  Chao, K J ^a,b   Kao, S C ^a   Yang, C M ^a   Hseu, M S ^a   Tsai, T G ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTROLYTES; SURFACE ACTIVE AGENTS;

MACROPORE ARRAYS;

POROUS SILICON;

EID: 0034295913     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391188     Document Type: Article

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