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Volumn 149, Issue 6, 2002, Pages
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Silicon anodization in HF ethanoic solutions. Competition between pore formation and homogeneous dissolution
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANODIC OXIDATION;
COMPOSITION;
CURRENT DENSITY;
DISSOLUTION;
HYDROFLUORIC ACID;
MORPHOLOGY;
POROSITY;
PROFILOMETRY;
SCANNING ELECTRON MICROSCOPY;
SOLUTIONS;
SURFACES;
X RAY PHOTOELECTRON SPECTROSCOPY;
ANODIZATION;
ELECTRODISSOLUTION;
ETHANOIC SOLUTIONS;
HOMOGENEOUS DISSOLUTION;
SILICON;
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EID: 0036607281
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1473778 Document Type: Article |
Times cited : (24)
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References (25)
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